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Foundry-Processed Optomechanical Mach-Zehnder Interferometers

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Abstract

We demonstrate foundry-processed optomechanical Mach-Zehnder interferometers using standard process development kit components and a post-process release. Measurements show clear optical phase shifting. Pump-probe experiments demonstrate all-optical excitation and readout of mechanical resonances.

© 2021 The Author(s)

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