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Conferences > CLEO_SI > 2021 > STu2A > STu2A.6

Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb

Hao Liu, Yoon-Soo Jang, Jinghui Yang, Mingbin Yu, Dim-Lee Kwong, and Chee Wei Wong

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Abstract

We present ultra-precision distance measurement based on spectral interferometer via single soliton microcomb generated in Si3N4 microresonator. We demonstrate 3-nm repeatability over a 23-mm non-ambiguity range via homodyne interferometry, over 1000s long-term stability.

© 2021 The Author(s)

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