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Optical Properties of the Refractory Metals at High Temperatures

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Abstract

We measure and compare the optical properties of thin refractory metal films (TiN, W, Mo and Ir) at temperatures up to 1000 °C. In-situ ellipsometry is used to measure the optical constants. Refractory metals show long-term structural stability at 1000 °C for 120 h.

© 2021 The Author(s)

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