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Low-Loss Nanoslot Waveguides for Sensing Fabricated in a CMOS Foundry

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Abstract

We demonstrate propagation loss as low as 0.3 dB/cm and high-fidelity sens-ing in foundry-fabricated silicon nitride nanoslot waveguides designed for wavelengths be-tween 700 nm and 1600 nm.

© 2021 The Author(s)

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