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Photonic integrated alumina waveguide gratings for far-field structured illumination at UV wavelengths

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Abstract

We demonstrate far-field UV structured illumination implemented with in-tegrated aluminum oxide (AlOx) waveguide gratings. Based on simulation and experi-mental results, we discuss the performances of two AlOx waveguide gratings operating at λ = 360nm.

© 2021 The Author(s)

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