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Tunable High Quality-Factor Silicon Microring Resonator Driven by High-Mobility Transparent Conductive Oxide

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Abstract

We demonstrated a silicon microring resonator driven by a titanium-doped indium oxide capacitor with 10 nm hafnium oxide insulator, achieving a high quality-factor of 11,700 with a high electro-optic tunability of 120 pm/V.

© 2021 The Author(s)

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