Laser-structured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity

Georgios Chatzigiannakis; Georgios Chatzigiannakis; Angelina Jaros; Renaud Leturcq; Jörgen Jungclaus; Tobias Voss; Spiros Gardelis; Maria Kandyla

doi:10.1364/CLEO_SI.2021.SM3B.2

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2021),
paper SM3B.2
•https://doi.org/10.1364/CLEO_SI.2021.SM3B.2

Laser-structured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity

Georgios Chatzigiannakis, Angelina Jaros, Renaud Leturcq, Jörgen Jungclaus, Tobias Voss, Spiros Gardelis, and Maria Kandyla

CLEO: Science and Innovations 2021

San Jose, California United States
9–14 May 2021
ISBN: 978-1-943580-91-0

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Laser Micro-/Nanostructuring (SM3B)

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G. Chatzigiannakis, A. Jaros, R. Leturcq, J. Jungclaus, T. Voss, S. Gardelis, and M. Kandyla, "Laser-structured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity," in Conference on Lasers and Electro-Optics, J. Kang, S. Tomasulo, I. Ilev, D. Müller, N. Litchinitser, S. Polyakov, V. Podolskiy, J. Nunn, C. Dorrer, T. Fortier, Q. Gan, and C. Saraceno, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper SM3B.2.

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Abstract

We develop ZnO/p-Si photodetectors by ALD deposition of ZnO thin films on laser- microstructured Si, which demonstrate high sensitivity and broadband operation (UV-Vis-NIR), due to increased specific surface area of the heterojunction and increased light absorption.

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