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Conferences > CLEO_SI > 2021 > JTu1I > JTu1I.4

Integrated optomechanical sensing for semiconductor metrology

A. Fiore, F. Galeotti, T. Liu, M. Petruzzella, I. Seršić Vollenbroek, G.G. Lindgren, F. Pagliano, F.W.M. van Otten, P.J. van Veldhoven, V. Pogoretskiy, Y. Jiao, A. Mohtashami, H. Sadeghian, and R.W. van der Heijden

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Abstract

In this talk we will present recent process on the integration of nano-opto-electro-mechanical sensors with photonic circuits and optical read-out, showing a route towards fully-integrated optical sensing.

© 2021 The Author(s)

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