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Fully Integrated Electronic-Photonic Biosensor for Label-Free Molecular Sensing in Advanced Zero-Change CMOS-SOI Process

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Abstract

We demonstrate the world's first fully integrated electronic-photonic label-free molecular sensor in a CMOS 45RFSOI commercial process. Real-time kinetics with 100nm lipid nanoparticles, mimicking SARS-CoV-2 particles, are presented utilizing micro-ring resonators integrated with on-chip electronics.

© 2021 The Author(s)

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