Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Low-loss D-shape Silicon Nitride Waveguides Using a Dielectric Lift-off Fabrication Process

Not Accessible

Your library or personal account may give you access

Abstract

D-shape SÌ3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12x106 for a 0.8 mm radius resonator.

© 2020 The Author(s)

PDF Article  |   Presentation Video
More Like This
250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides

Debapam Bose, Jiawei Wang, and Daniel J. Blumenthal
SF3O.1 CLEO: Science and Innovations (CLEO:S&I) 2022

Ultra-Low Loss 698 nm and 450 nm Silicon Nitride Visible Wavelength Waveguides for Strontium Atomic Clock Applications

Nitesh Chauhan, Jiawei Wang, Debapam Bose, Renan Moreira, and Daniel J. Blumenthal
STh1J.2 CLEO: Science and Innovations (CLEO:S&I) 2020

Low-loss Thin Film Lithium Niobate Bonded on Silicon Nitride Waveguides

Siddhartha Ghosh, Siva Yegnanarayanan, Matthew Ricci, Dave Kharas, and Paul Juodawlkis
STh1F.1 CLEO: Science and Innovations (CLEO:S&I) 2020

Presentation Video

Presentation video access is available to:

  1. Optica Publishing Group subscribers
  2. Technical meeting attendees
  3. Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads


More Like This
250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides

Debapam Bose, Jiawei Wang, and Daniel J. Blumenthal
SF3O.1 CLEO: Science and Innovations (CLEO:S&I) 2022

Ultra-Low Loss 698 nm and 450 nm Silicon Nitride Visible Wavelength Waveguides for Strontium Atomic Clock Applications

Nitesh Chauhan, Jiawei Wang, Debapam Bose, Renan Moreira, and Daniel J. Blumenthal
STh1J.2 CLEO: Science and Innovations (CLEO:S&I) 2020

Low-loss Thin Film Lithium Niobate Bonded on Silicon Nitride Waveguides

Siddhartha Ghosh, Siva Yegnanarayanan, Matthew Ricci, Dave Kharas, and Paul Juodawlkis
STh1F.1 CLEO: Science and Innovations (CLEO:S&I) 2020

Towards low-loss monolithic silicon and nitride photonic building blocks in state-of-the-art 300mm CMOS foundry

Yusheng Bian, Javier Ayala, Colleen Meagher, Bo Peng, Michal Rakowski, Ajey Jacob, Karen Nummy, Andy Stricker, Zoey Sowinski, Asli Sahin, Abdelsalam Aboketaf, Shuren Hu, Ian Stobert, Kate Mclean, Louis Medina, Kevin Dezfulian, Brendan Harris, Subramanian Krishnamurthy, Thomas Houghton, Won Suk Lee, Massimo Sorbara, Dave Riggs, Ted Letavic, Anthony Yu, Ken Giewont, and John Pellerin
FW5D.2 Frontiers in Optics (FiO) 2020

Silicon nitride integrated photonic platform at 780 nm wavelength

Sonya Palmer, Andreas Boes, Guanghui Ren, Thach Nguyen, and Arnan Mitchell
C3C_3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2020

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved