Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Broadband Optical Fiber-Facet Silicon Pressure Sensor

Not Accessible

Your library or personal account may give you access

Abstract

A buried photonic element fabrication technique is used to create a broadband optical fiber-facet absolute pressure sensor in a 1 50 /i m wide by 5 /im thick crystalline silicon disk with 50 /iatm pressure resolution at 1 atm.

© 2020 The Author(s)

PDF Article  |   Presentation Video
More Like This
Fabrication of a Miniature Fiber-optic EFPI Pressure Sensor

Yana Shang, Zhenzhen Li, Na Chen, Zhenyi Chen, Qiang Guo, Shupeng Liu, and Tingyun Wang
AF2I.6 Asia Communications and Photonics Conference (ACP) 2013

High-consistent and high-stable fiber-optic MEMS sensor array for accurate pressure measurement

Ke Tan, Xiaoshuang Dai, Zhiyuan Li, Xueping Li, Shikai Li, Hongyu Liu, Shuang Wang, and Tiegen Liu
W4.49 Optical Fiber Sensors (OFS) 2023

Pressure sensor using optical fibers

Katsuharu Iwamoto, Isao Kamata, Osamu Kawakami, and Hideo Miyagawa
WG4 OSA Annual Meeting (FIO) 1987

Presentation Video

Presentation video access is available to:

  1. Optica Publishing Group subscribers
  2. Technical meeting attendees
  3. Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads


More Like This
Fabrication of a Miniature Fiber-optic EFPI Pressure Sensor

Yana Shang, Zhenzhen Li, Na Chen, Zhenyi Chen, Qiang Guo, Shupeng Liu, and Tingyun Wang
AF2I.6 Asia Communications and Photonics Conference (ACP) 2013

High-consistent and high-stable fiber-optic MEMS sensor array for accurate pressure measurement

Ke Tan, Xiaoshuang Dai, Zhiyuan Li, Xueping Li, Shikai Li, Hongyu Liu, Shuang Wang, and Tiegen Liu
W4.49 Optical Fiber Sensors (OFS) 2023

Pressure sensor using optical fibers

Katsuharu Iwamoto, Isao Kamata, Osamu Kawakami, and Hideo Miyagawa
WG4 OSA Annual Meeting (FIO) 1987

AFM engine with optical actuation and readout printed on the facet of a multi-core fiber

Mareike Trappen, Philipp-Immanuel Dietrich, Pascal Burger, Matthias Blaicher, Gerald Goring, Thomas Schimmel, Wolfgang Freude, Hendrik Holscher, and Christian Koos
SM2N.7 CLEO: Science and Innovations (CLEO:S&I) 2020

Highly Sensitive Optical Fiber Ultrasonic Sensor for Partial Discharge Detection

Meiling Wang, Tao Liu, Yu Wu, and Yunjiang Rao
W4.14 Optical Fiber Sensors (OFS) 2020

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved