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Transmission Metalens with Fixed-Gap Nanopillars for Immersion Lithography Patterning on 12-inch Glass Wafer

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Abstract

Metalens with fixed-gap nanopillars release fabrication challenges in photolithography on CMOS platform. Their performances are investigated through simulation, and the characterization results of metalens patterned directly on 12-inch glass-wafer via immersion lithography are presented.

© 2020 The Author(s)

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