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CMOS-Compatible Metasurface-based Subtractive Color Filters on a 300-mm Glass Wafer

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Abstract

Si metasurface-based subtractive color filter (SCF) is demonstrated on a 300-mm glass wafer. The transmittance of periodic Si pillars is investigated both numerically and experimentally. The SCF-based pseudo color image is also presented.

© 2020 The Author(s)

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