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Motheye Structures Antireflective Coatings for Enhancing GaAs Transmission Performance at Mid-Infrared Wavelengths

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Abstract

We have fabricated GaAs motheye structures using contact photolithography printing. We have achieved an average transmission improvement of 123% from 2000 cm -1 to 700 cm-1 (5 ¿urn-14 ¿urn) relative to an uncoated wafer.

© 2020 The Author(s)

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