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Optical frequency comb generation using low stress reactive sputtered silicon nitride waveguides

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Abstract

We demonstrate fully CMOS-compatible anomalous dispersive SiN microring resonators with an intrinsic Q factor of 6.6 × 105 based on reactive sputtering SiN, yielding in a 250 nm wide modulation-instability frequency comb.

© 2020 The Author(s)

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