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Conferences > CLEO_SI > 2019 > STh1O > STh1O.4

Embedded dielectric metasurface based subtractive color filter on a 300mm glass wafer

Zhengji Xu, Yuan Dong, Yuan Hsing Fu, Qize Zhong, Ting Hu, Dongdong Li, Yu Li, Nanxi Li, Ying Lin, Qunying Lin, Shiyang Zhu, and Navab Singh

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Abstract

Si metasurface embedded subtractive color filters (SCFs) is firstly demonstrated on a 300mm glass wafer using CMOS-compatible fabrication process. Three transmission dips were observed at 528, 568, and 598 nm wavelengths for different SCF designs.

© 2019 The Author(s)

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