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Conferences > CLEO_SI > 2019 > SF2I > SF2I.6

High-Q Resonators on Single Crystal Aluminum Nitride Grown by Molecular Beam Epitaxy

Yi Sun, David Laleyan, Eric Reid, Ping Wang, Xianhe Liu, Ayush Pandey, Mohammad Soltani, and Zetian Mi

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Abstract

We report the demonstration of high-Q (> 70,000) microring resonators at 770 nm wavelength using single crystal aluminum nitride (AlN) grown by molecular-beam-epitaxy (MBE) which is a crucial growth technique enabling electronic/photonic integration with III-Nitrides.

© 2019 The Author(s)

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