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High-Q Microresonators Integrated with Microheaters on a 3C-SiC-on-Insulator Platform

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Abstract

We demonstrate thermally-reconfigurable high-Q microring resonators with integrated microheaters on a 3C-SiC-on-insulator platform. A resonance shift of 30 pm/mW is achieved in 40µm-radius microrings (Q0~88,000 at λ=1550 nm), corresponding to ~50 mW per π phase shift.

© 2019 The Author(s)

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