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Monolithic Integration of Quantum Cascade Laser, Quantum Cascade Detector and Slotted Photonic Crystal Waveguide for Absorbance Sensing from λ=3–15μm

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Abstract

We demonstrate monolithic integration of quantum cascade laser and detector and slotted photonic crystal waveguide on a single epitaxial heterostructure for on-chip slow light enhanced absorption sensing. Designs can cover λ=3-15μm wavelengths without wafer bonding.

© 2018 The Author(s)

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