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Integrated Amorphous Silicon-Aluminum Long-Range Surface Plasmon Polaritons (LR-SPP) Waveguides

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Abstract

We demonstrate Long Range Surface Plasmon Polaritons waveguide with aluminum embedded in amorphous silicon. It operates in the telecom band and is compatible with backend CMOS process. Transmission and near field measurement results are reported.

© 2018 The Author(s)

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