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Conferences > CLEO_SI > 2018 > SM4O > SM4O.3

Surface Relief Structuring via Multiple Pulse Femtosecond Ablation using an Intensity Spatial Light Modulator

Ben Mills, Daniel J. Heath, Rupert. A. Bapty, Taimoor H. Rana, Behrad Gholipour, James A. Grant-Jacob, and Robert W. Eason

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Abstract

Subtractive femtosecond laser machining using multiple pulses with different spatial intensity profiles on the same position on a sample enables surface relief structuring with up to 60 layers, 330nm spatial resolution, 3µm maximum depth.

© 2018 The Author(s)

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