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Electron beam-induced tunable radiation from silicon-only structures in the near-infrared

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Abstract

We experimentally demonstrate the generation of tunable radiation from silicon-only periodic structures in the near-infrared (up to 1550nm). Spontaneous emission from low-energy electrons (down to 2 keV) is recorded in a modified scanning electron microscope, matching our theoretical predictions.

© 2018 The Author(s)

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