Abstract
We demonstrate a 3D integrated silicon photonic unit cell with ultra-compact vertical U-turn interlayer coupling structures. A 120-channel folded single tile optical phase array with 2μm pitch is fabricated as a proof-of-concept.
© 2018 The Author(s)
PDF ArticleMore Like This
Yu Zhang, Chuan Qin, Kuanping Shang, Gengchen Liu, Guangyao Liu, and S. J. Ben Yoo
Tu2A.6 Optical Fiber Communication Conference (OFC) 2018
Reza Fatemi, Aroutin Khachaturian, and Ali Hajimiri
STu4B.6 CLEO: Science and Innovations (CLEO:S&I) 2018
Hyunil Byun, Jisan Lee, Bongyong Jang, Changbum Lee, Eunkyung Lee, Inoh Hwang, Changgyun Shin, Dongjae Shin, Dongshik Shim, Tatsuhiro Otsuka, Sungwoo Hwang, Hyuck Choo, and Kyoungho Ha
STh3O.7 CLEO: Science and Innovations (CLEO:S&I) 2020