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Compact, High Extinction Ratio Silicon Mach-Zehnder Modulator with Corrugated Waveguides

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Abstract

An integrated silicon photonic MZM modulator with a slow-wave architecture to reduce VπL is presented. This structure achieves an 80% enhancement in extinction ratio and has a 14GHz bandwidth with 1mm long modulator arms.

© 2018 The Author(s)

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