Abstract
We demonstrate the broadband electro-optical (EO) polymer modulator in the hybrid silicon Mach-Zehnder interferometer. The waveguide consists of the 50 nm-thick silicon core with the EO polymer cladding. The fabrication of the hybrid waveguide can be totally carried out by using the conventional photolithography technique. The recorded half-wave voltage (Vπ) of the modulator was 0.9 V at 1550 nm. The traveling-wave electrode was applied to the modulator to test the frequency response up to 40 GHz. The modulator showed the excellent temperature stability at 85°C for longer than 2000 hours.
© 2017 Optical Society of America
PDF ArticleMore Like This
Shiyoshi Yokoyama, Hiroki Miura, Qiu Feng, and Andrew M. Spring
ITh2A.4 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2017
Shiyoshi Yokoyama, Qiu Feng, Andrew M. Spring, Hiromu Sato, Hiroki Miura, and Yukinori Inoue
ITu2B.3 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2016
Yasufumi Enami, Jingdong Luo, and Alex K-Y. Jen
JT3A.23 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2014