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2D Photonic Crystal Structures in Silicon Rich Nitride Platform

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Abstract

Here we report the experimental demonstration of 2D Photonic Crystal waveguide (PhC) and cavity in suspended silicon rich nitride platform. We demonstrate W0.7 PhC waveguide with 70 nm transmission bandwidth and a PhC cavity with an ultra-high Q-factor of over 100,000.

© 2017 Optical Society of America

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