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Conferences > CLEO_SI > 2017 > JTu3O > JTu3O.5

Damage Performance of Ion Beam Sputtered Sc2O3 and HfO2 Single Layers Tested in Air and Ultra-high Vacuum

P. F. Langston, D. Patel, B. A. Reagan, F. J. Furch, A. H. Curtis, J.J. Rocca, and C.S. Menoni

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Abstract

Results of a study of laser induced damage of ion beam sputtered single layers and capped single layers of Sc2O3, HfO2 and Ta2O5 in a controlled atmosphere and in an ultra-high vacuum (UHV) show the choice of material is paramount to achieving the best performance.

© 2017 Optical Society of America

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