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A Butt-Coupled 3D-Bulk Si CMOS Photodetector Array Integrated with a Monolithic U-Groove Array on a Single Chip

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Abstract

An integrated butt-coupled 3D bulk-CMOS Si photodetector array including a large passivated photoactive area for visible-light is presented. The device shows a leakage current of 78.5nA and a capacitance of ~30fF at 5V reverse bias.

© 2017 Optical Society of America

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Poster Presentation

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