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Conferences > CLEO_SI > 2016 > STh4Q > STh4Q.1

Fully CMOS-Compatible TiN Nanoantennas

Justin A. Briggs, Gururaj V. Naik, Trevor A. Petach, Brian K. Baum, David Goldhaber-Gordon, and Jennifer A. Dionne

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Abstract

We report the first visible/NIR darkfield scattering spectroscopy measurements of single titanium nitride nanostructures. We grow these fully CMOS-compatible nanoantennas via low-temperature atomic layer deposition and characterize and correlate their optical and material properties.

© 2016 Optical Society of America

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