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Conferences > CLEO_SI > 2016 > STh1G > STh1G.5

67 GHz uni-traveling carrier photodetector on an InP-membrane-on-silicon platform

L. Shen, Y. Jiao, W. Yao, Z. Cao, J. van der Tol, G. Roelkens, and M. Smit

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Abstract

An InP membrane-based uni-traveiling carrier photodetector, heterogeneously integrated on silicon, is realized using double-sided processing. A responsivity of 0.7 A/W at 1.55 μm and a 3 dB bandwidth beyond 67 GHz are demonstrated.

© 2016 Optical Society of America

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