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Axial confinement in the monolithic integrated self-rolled-up vertical SiNx microring resonator on a ridge waveguide

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Abstract

Effective axial confinement to the self-rolled-up SiNx microtube was incorporated to form a vertical microring resonator. 3× wider FSR was observed in the monolithically integrated vertical microring coupler and a silicon nitride ridge waveguide.

© 2016 Optical Society of America

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