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Ultra-High-Q Silica-on-Silicon Ridge-Ring-Resonator with an Integrated Silicon Nitride Waveguide

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Abstract

A microcavity resonator having a Q factor exceeding 100 million and featuring a monolithic silicon nitride waveguide is demonstrated. This device enables full integration of ultra-high-Q resonators with other photonic components.

© 2016 Optical Society of America

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