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Broadband Mid-Infrared Frequency Comb Generation in a Si3N4 Microresonator

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Abstract

We demonstrate broadband frequency comb generation in the mid-infrared from 2.3 to 3.5 µm in a Si3N4 microresonator with Q=850,000 fabricated using an optimized process for decreasing intrinsic losses and overcoming stress limitations.

© 2015 Optical Society of America

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