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Conferences > CLEO_SI > 2015 > STu2F > STu2F.7

Crystalline Silicon on Silicon Nitride Hybrid Platform for Integrated Photonic Applications

Amir H. Hosseinnia, Amir H. Atabaki, Qing Li, Hesam Moradinejad, Majid Sodagar, Farshid Ghasemi, Ali A. Eftekhar, and Ali Adibi

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Abstract

We demonstrate a hybrid material platform, in which a layer of crystalline silicon is placed on top of a silicon nitride on a silicon dioxide die. We also report an efficient interlayer coupling structure with 0.02 dB insertion loss. Using this hybrid platform, high-Q resonators are demonstrated.

© 2015 Optical Society of America

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