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Conferences > CLEO_SI > 2014 > STu3G > STu3G.1

Zn+ Implanted Silicon Waveguide Photodiodes for On-Chip Mid-Infrared Detection

Richard R. Grote, Brian Souhan, Noam Ophir, Jeffrey B. Driscoll, Keren Bergman, Hassaram Bakhru, William M. J. Green, and Richard M. Osgood

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Abstract

We present the first experimental demonstration of Zn+ implanted Si waveguide photodiodes for 2.2-2.4 μm operation. Preliminary responsivities > 65 mA/W are measured, suggesting suitability for on-chip sensing and communications applications in the mid-infrared.

© 2014 Optical Society of America

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