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Distributed Electrode Mach-Zehnder Modulator with Double-Pass Phase Shifters and Integrated Inductors

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Abstract

A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features ‘double-pass’ optical phase shifter segments, and the first use of integrated inductors in a ‘velocity-matched’ distributed-electrode configuration.

© 2014 Optical Society of America

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