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Conferences > CLEO_SI > 2014 > STh3M > STh3M.1

Efficient Thermally Tunable Linear Photonic Crystal Cavities in a Zero-Change Microelectronics SOI CMOS Process

Christopher V. Poulton, Xiaoge Zeng, Mark T. Wade, Jeffrey M. Shainline, and Miloš A. Popović

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Abstract

We demonstrate directly-doped Si tunable linear photonic crystal microcavities. Also the first tunable photonic crystals realized in an advanced (45nm) SOI CMOS microelectronics process with no in-foundry process changes, they show 0.63nm/mW tuning efficiency.

© 2014 Optical Society of America

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