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Conferences > CLEO_SI > 2014 > SM1H > SM1H.4

Fabrication of Diffractive Optical Elements with Digital Projection Photochemical Etching

Chris Edwards, Kaiyuan Wang, Benjamin G. Griffin, Renjie Zhou, Basanta Bhaduri, Gabriel Popescu, and Lynford L. Goddard

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Abstract

We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step.

© 2014 Optical Society of America

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