Tuning Fork Cavity Optomechanical Transducers

Yuxiang Liu; Yuxiang Liu; Marcelo Davanco; Chaoyang Ti; Vladimir Aksyuk; Kartik Srinivasan

doi:10.1364/CLEO_SI.2014.SF2M.4

CLEO: 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper SF2M.4
•https://doi.org/10.1364/CLEO_SI.2014.SF2M.4

Tuning Fork Cavity Optomechanical Transducers

Yuxiang Liu, Marcelo Davanco, Chaoyang Ti, Vladimir Aksyuk, and Kartik Srinivasan

CLEO: Science and Innovations 2014

San Jose, California United States
8–13 June 2014
ISBN: 978-1-55752-999-2

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Optomechanics II (SF2M)

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Y. Liu, M. Davanco, C. Ti, V. Aksyuk, and K. Srinivasan, "Tuning Fork Cavity Optomechanical Transducers," in CLEO: 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper SF2M.4.

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Abstract

We present on-chip Si₃N₄ optomechanical transducers that integrate nanomechanical tuning forks with microdisk resonators for displacement measurements. Enhanced mechanical Q relative to single cantilevers and mechanical frequency adjustment by beam stress engineering were realized.

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