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Conferences > CLEO_SI > 2014 > JW2A > JW2A.97

Anisotropically Etched Silicon Surfaces for Planar Plasmonic Terahertz Guided Wave Devices

Gagan Kumar, Shanshan Li, Mohammad M. Jadidi, and Thomas E. Murphy

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Abstract

We report a terahertz waveguide fabricated from doped crystalline silicon. Anisotropic chemically etching is used to produce a periodic array of concave pyramidal troughs in the silicon that provide confinement in both transverse directions.

© 2014 Optical Society of America

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