Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Development of a CMOS Compatible Biophotonics Platform Based on SiN Nanophotonic Waveguides

Not Accessible

Your library or personal account may give you access

Abstract

We report on the development of low-loss photonic components fabricated in low-temperature PECVD SiN for the development of a CMOS compatible biophotonics platform. We discuss modeling and experimental demonstration of strip waveguides, MMI and evanescent couplers, fractal trees for power distribution and AWGs and waveguide-integrated resonators as wavelength selective components.

© 2014 Optical Society of America

PDF Article
More Like This
CMOS-Compatible Silicon Nitride Waveguide on Silicon Photonics Platform

Yuriko Maegami, Makoto Okano, Guangwei Cong, Keijiro Suzuki, Morifumi Ohno, Toshihiro Narushima, Nobuyuki Yokoyama, Miyoshi Seki, Shigeru Saitou, Minoru Ohtsuka, Hitoshi Kawashima, and Koji Yamada
ITu3A.3 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2021

Hybrid CMOS-compatible Material and Device Platform for Integrated Nanophotonics

Amir H. Hosseinnia, Hesam Maoradinejad, Majid Sodagar, Ali A. Eftekhar, and Ali Adibi
SM4G.1 CLEO: Science and Innovations (CLEO:S&I) 2016

O-Band Fiber-to-Chip Edge Coupler for High NA Fiber Based on a CMOS Compatible SOI Platform

Min Teng, Hao Wu, Chenlei Li, Feng Wang, Yinchao Du, and Xuezhe Zheng
Th2A.5 Optical Fiber Communication Conference (OFC) 2022

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved