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Design Optimization and Experimental Demonstration of Low VπL Carrier-Depletion Silicon Mach-Zehnder Modulator

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Abstract

We design, optimize and demonstrate a highly efficient carrier-depletion silicon Mach-Zehnder modulator with very low VπL of ~0.2Vcm. Design consideration, fabrication process and experimental results will be presented.

© 2013 Optical Society of America

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