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Conferences > CLEO_SI > 2013 > CTh4F > CTh4F.4

Silicon-on-Nitride Optical Waveguides for Mid- and Near-Infrared Integrated Photonics

Saeed Khan, Jeff Chiles, Jichi Ma, and Sasan Fathpour

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Abstract

Silicon-on-nitride waveguides are demonstrated at mid- and near-infrared wavelengths. The fabrication is based on bonding silicon to silicon-on-insulator dies coated with low-stress silicon nitride. At 3.39 pm wavelength, the measured propagation loss is ~5 dB/cm.

© 2013 Optical Society of America

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