High Q SiC on Silicon Microresonators

Jaime Cardenas; Mian Zhang; Chris Phare; Shreyas Shah; Carl B. Poitras; Michal Lipson; Michal Lipson

doi:10.1364/CLEO_SI.2013.CF2I.4

CLEO: 2013
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper CF2I.4
•https://doi.org/10.1364/CLEO_SI.2013.CF2I.4

High Q SiC on Silicon Microresonators

Jaime Cardenas, Mian Zhang, Chris Phare, Shreyas Shah, Carl B. Poitras, and Michal Lipson

CLEO: Science and Innovations 2013

San Jose, California United States
9–14 June 2013
ISBN: 978-1-55752-972-5

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Microresonators, Waveguides and their Characterization (CF2I)

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J. Cardenas, M. Zhang, C. Phare, S. Shah, C. B. Poitras, and M. Lipson, "High Q SiC on Silicon Microresonators," in CLEO: 2013, OSA Technical Digest (online) (Optica Publishing Group, 2013), paper CF2I.4.

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Abstract

We demonstrate a 20um radius suspended microring resonator with Q=19,000 fabricated on SiC-on-silicon substrates. We estimate the fundamental material losses to be less than 3.3 dB/cm indicating that quality factors greater than 10⁵ are possible.

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