Terahertz non-invasive sub-surface nano-scanner

Anis Rahman; Aunik K Rahman

doi:10.1364/CLEO_SI.2013.AF2J.4

CLEO: 2013
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper AF2J.4
•https://doi.org/10.1364/CLEO_SI.2013.AF2J.4

Terahertz non-invasive sub-surface nano-scanner

Anis Rahman and Aunik K Rahman

CLEO: Science and Innovations 2013

San Jose, California United States
9–14 June 2013
ISBN: 978-1-55752-972-5

From the session
Applied Optical Measurements in Fabrication Processes and Products II (AF2J)

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A. Rahman and A. K. Rahman, "Terahertz non-invasive sub-surface nano-scanner," in CLEO: 2013, OSA Technical Digest (online) (Optica Publishing Group, 2013), paper AF2J.4.

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Abstract

A terahertz sub-surface scanner is introduced that utilizes reflection mode non-contact interrogation of surfaces and interior layers of composite substrates with resolution of ~1 nm. Quantitative measurements are done by implementing a modified Beer-Lambert’s law.

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