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Conferences > CLEO_SI > 2012 > CW1M > CW1M.5

A Platform for On-Chip Silica Optomechanical Oscillators with Integrated Waveguides

Karen E. Grutter, Alejandro Grine, Myung-Ki Kim, Niels Quack, Tristan Rocheleau, Clark T.-C. Nguyen, and Ming C. Wu

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Abstract

We present a new phosphosilicate glass photonic integrated circuit platform for optomechanical systems. Wafer-scale reflow enables high-Q (1.5×106) resonators and closely-spaced (250nm) waveguides. Optomechanical resonance (71.9MHz) is demonstrated.

© 2012 Optical Society of America

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