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Conferences > CLEO_SI > 2012 > CM3A > CM3A.5

3-D Integration of Silicon Nitride on Silicon-on-Insulator Platform

Qing Li, Ali A. Eftekhar, Amir H. Atabaki, and Ali Adibi

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Abstract

We propose a new material platform using vertical integration of silicon nitride on silicon-on-insulator for optimizing device performances in silicon photonics. Preliminary results including silicon nitride growth, high-Q resonator fabrication, and vertical integration are presented.

© 2012 Optical Society of America

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