High Q optomechanical resonators in silicon nitride nanophotonic circuits

King Yan Fong; Wolfram Pernice; Mo Li; Hong Tang

doi:10.1364/CLEO_SI.2011.CThJ5

CLEO:2011 - Laser Applications to Photonic Applications
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper CThJ5
•https://doi.org/10.1364/CLEO_SI.2011.CThJ5

High Q optomechanical resonators in silicon nitride nanophotonic circuits

King Yan Fong, Wolfram Pernice, Mo Li, and Hong Tang

CLEO: Science and Innovations 2011

Baltimore, Maryland United States
1–6 May 2011
ISBN: 978-1-55752-910-7

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Optomechanics I (CThJ)

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K. Y. Fong, W. Pernice, M. Li, and H. Tang, "High Q optomechanical resonators in silicon nitride nanophotonic circuits," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper CThJ5.

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Abstract

We demonstrate nanophotonic circuits for integration of high Q micromechanical resonators and nanooptical components. Mechanical resonance of nanostring is actuated and readout by optomechanical interaction. Quality factor up to 696,000 is obtained.

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