Cavity optomechanical sensors for atomic force microscopy

Kartik Srinivasan; Houxun Miao; Houxun Miao; Matthew T. Rakher; Marcelo Davanço; Marcelo Davanço; Vladimir Aksyuk; Vladimir Aksyuk

doi:10.1364/CLEO_SI.2011.CThJ2

CLEO:2011 - Laser Applications to Photonic Applications
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper CThJ2
•https://doi.org/10.1364/CLEO_SI.2011.CThJ2

Cavity optomechanical sensors for atomic force microscopy

Kartik Srinivasan, Houxun Miao, Matthew T. Rakher, Marcelo Davanço, and Vladimir Aksyuk

CLEO: Science and Innovations 2011

Baltimore, Maryland United States
1–6 May 2011
ISBN: 978-1-55752-910-7

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Optomechanics I (CThJ)

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K. Srinivasan, H. Miao, M. T. Rakher, M. Davanço, and V. Aksyuk, "Cavity optomechanical sensors for atomic force microscopy," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper CThJ2.

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Abstract

We develop a silicon cavity optomechanical sensor for atomic force microscopy through near-field coupling between a nanocantilever and microdisk cavity. The device exhibits $sub-fm/ \sqrt{Hz}$ displacement sensitivity, GHz bandwidth, and > 60 dB of dynamic range.

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