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Ultrathin Optomechanical SiNx Nanomembranes with Photonic Crystal Fano Resonances for Enhanced Radiation Pressure

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Abstract

We fabricate 50-nm-thick SiNx photonic crystal nanomembranes for cavity quantum optomechanics, supported by complete ab-initio numerical simulations. Broadband normal incidence transmission measurements demonstrate Fano-type guided resonances near 1064-nm for enhanced reflectivity and radiation pressure effects.

© 2011 Optical Society of America

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